JPH0414953Y2 - - Google Patents

Info

Publication number
JPH0414953Y2
JPH0414953Y2 JP1986176165U JP17616586U JPH0414953Y2 JP H0414953 Y2 JPH0414953 Y2 JP H0414953Y2 JP 1986176165 U JP1986176165 U JP 1986176165U JP 17616586 U JP17616586 U JP 17616586U JP H0414953 Y2 JPH0414953 Y2 JP H0414953Y2
Authority
JP
Japan
Prior art keywords
substrate
work stage
vacuum chamber
vacuum
air suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986176165U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6382966U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986176165U priority Critical patent/JPH0414953Y2/ja
Publication of JPS6382966U publication Critical patent/JPS6382966U/ja
Application granted granted Critical
Publication of JPH0414953Y2 publication Critical patent/JPH0414953Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Screen Printers (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
JP1986176165U 1986-11-18 1986-11-18 Expired JPH0414953Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986176165U JPH0414953Y2 (en]) 1986-11-18 1986-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986176165U JPH0414953Y2 (en]) 1986-11-18 1986-11-18

Publications (2)

Publication Number Publication Date
JPS6382966U JPS6382966U (en]) 1988-05-31
JPH0414953Y2 true JPH0414953Y2 (en]) 1992-04-03

Family

ID=31116151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986176165U Expired JPH0414953Y2 (en]) 1986-11-18 1986-11-18

Country Status (1)

Country Link
JP (1) JPH0414953Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63117492A (ja) * 1986-11-06 1988-05-21 株式会社ケンウッド 厚膜ハイブリッド印刷装置のワ−ク・ステ−ジ構造

Also Published As

Publication number Publication date
JPS6382966U (en]) 1988-05-31

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